BROOKS INSTRUMENT, LLC
Patent Owner
Stats
- 87 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Apr 25, 2017 most recent publication
Details
- 87 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 2,418 Total Citation Count
- May 15, 1989 Earliest Filing
- 23 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
8751180 Methods and apparatus for pressure compensation in a mass flow controllerSep 18, 08Jun 10, 14[G01F]
8511169 Monolithic vacuum manometer utilizing electrostatic interference as a means of detectionJan 09, 12Aug 20, 13[G01L, H05K]
8504318 System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensorMar 05, 08Aug 06, 13[G01F]
8141430 Monolithic vacuum manometer utilizing electrostatic interference as a means of detectionJun 30, 10Mar 27, 12[G01L, H05K]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2012/0197,446 ADVANCED FEED-FORWARD VALVE-CONTROL FOR A MASS FLOW CONTROLLERAbandonedDec 01, 11Aug 02, 12[G05D]
8197133 System and method for sensor thermal drift offset compensationExpiredDec 01, 08Jun 12, 12[G01K]
2011/0191,038 MASS FLOW CONTROLLER WITH IMPROVED DYNAMIC RESPONSEAbandonedFeb 24, 11Aug 04, 11[G06F, G01F]
7941284 Systems, apparatuses, and methods for measuring a fluid characteristic using a coriolis flow meterExpiredMar 03, 09May 10, 11[G01F]
7377152 Method and device for determining a characteristic value that is representative of the condition of a gasExpiredOct 17, 03May 27, 08[G01N]
7216019 Method and system for a mass flow controller with reduced pressure sensitivityExpiredJul 08, 04May 08, 07[G05D]
7113895 System and method for filtering output in mass flow controllers and mass flow metersExpiredAug 26, 04Sep 26, 06[G06F]
7073388 Variable capacitance measuring device comprising a glass-ceramic insulatorExpiredNov 23, 04Jul 11, 06[G01L]
6445980 System and method for a variable gain proportional-integral (PI) controllerExpiredJul 10, 99Sep 03, 02[G05D]
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